
Ultrasonic Atomization Pyrolysis CVD System
The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into uniform micro- or sub-micron droplets, which are then...

Overview
The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into uniform micro- or sub-micron droplets, which are then transported by carrier gas into a high-temperature reaction zone. On the substrate surface, the droplets undergo pyrolysis or chemical reactions to form high-quality solid thin films.
This technology is particularly suitable for material systems where high-purity gaseous precursors are difficult to obtain or prohibitively expensive. It represents a significant upgrade over conventional CVD and spray pyrolysis methods.
Key Features
Wide Range of Precursor Sources & Low Cost
The system can utilize inexpensive and readily available liquid metal salt solutions (e.g., nitrates, chlorides, acetates), avoiding costly and hazardous metal-organic gas precursors.Precise Composition Control
Multiple precursor solutions can be mixed in controlled ratios for ultrasonic atomization, enabling precise doping and composition regulation for multicomponent thin films, such as perovskites or ternary cathode materials.Excellent Film Uniformity
Ultrasonic atomization produces fine droplets with narrow size distribution and uniform concentration, resulting in films with consistent thickness and composition.Large Deposition Area
The system supports large-area uniform deposition, making it ideal for roll-to-roll continuous production processes.Relatively Low Operating Temperature
Compared with conventional CVD, certain materials (e.g., FTO) can be deposited at lower temperatures (450–550°C), reducing thermal stress on substrates.Capability to Fabricate Complex Morphologies
By adjusting process parameters such as solution concentration, flow rate, and temperature, the system can control thin-film microstructures, including dense, porous, and nanoparticle-based films.Environmentally Friendly
The system avoids the use of highly toxic metal-organic precursors, and solvents can be recovered and reused, making the process greener and safer.
Applications
Transparent conductive films (e.g., FTO, ITO)
Perovskite solar cells and optoelectronic devices
Battery cathode and anode materials
Multicomponent oxide thin films
Nanostructured coatings for sensors and catalysts
All about Aerosol-Assisted Chemical Vapor Deposition (AACVD) System
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Component | Parameter | Specification |
|---|---|---|
| Ultrasonic Atomizer | Device Name | Corrosion-Resistant Ultrasonic Atomizer |
| Power Supply | Single Phase 220V 50Hz | |
| Rated Power | 55 W (Atomizer: 35 W, Peristaltic Pump: 20 W) | |
| Rated Flow Rate | 9 ml/min | |
| Peristaltic Pump Head Model | WP110 | |
| Peristaltic Pump Tube Size | φ2 mm (ID) × 1 mm (Wall Thickness) | |
| Rotameter (Float Flow Meter) | 0.5–8 L/min | |
| Solution Tank Capacity | 160 ml | |
| Atomized Droplet Size | 5–10 μm | |
| Atomization Frequency | 2.4 MHz | |
| Device Dimensions (with Metal Rail & Base) | 800 mm (L) × 390 mm (H) × 280 mm (D) | |
| Device Weight (with Metal Rail & Base) | ~10 kg | |
| Mini Tube Furnace | Device Name | Mini Tube Furnace |
| Model | O1200-50 | |
| Power Supply | 220V/50Hz | |
| Rated Power | 1.2 kW | |
| Maximum Temperature | 1200℃ | |
| Rated Temperature | 1150℃ | |
| Furnace Chamber | Φ80 × 200 mm | |
| Device Dimensions | 920 mm (L) × 460 mm (H) × 360 mm (D) | |
| Sensor Type | K-type Thermocouple | |
| Recommended Heating Rate | 10℃/min | |
| Compatible Furnace Tube Sizes | Φ25 × 600 mm, Φ50 × 600 mm | |
| Device Weight | ~23 kg | |
| Control System | 1. 15 programmable temperature curves 2. 7-inch full-color touch screen 3. Non-linear temperature correction 4. over-temperature alarm, thermocouple failure warning, leakage protection | |
| Temperature Accuracy | ±1℃ | |
| Service & Warranty | One-year limited warranty with lifetime support (consumable parts such as processing tubes and O-rings are not covered under warranty and should be ordered separately under related products). |
Ultrasonic Atomization Pyrolysis CVD System In Detail

Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
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Ordering Ultrasonic Atomization Pyrolysis CVD System
What is Ultrasonic Atomization Pyrolysis CVD System typically used for?
The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into u
How quickly can Ultrasonic Atomization Pyrolysis CVD System be shipped?
Most standard ZYLAB models are held in stock. After testing and packing we normally ship Ultrasonic Atomization Pyrolysis CVD System within 3 to 7 days. Customised builds are scheduled after the drawing is confirmed, and we give you the date in writing before the order is placed.
Is there a minimum order quantity for Ultrasonic Atomization Pyrolysis CVD System?
No. ZYLAB has no minimum order requirement, so a single unit of Ultrasonic Atomization Pyrolysis CVD System is a normal order. Occasionally a component supplier imposes a minimum quantity of their own, and we tell you as soon as we are notified.
Can we get technical help before ordering Ultrasonic Atomization Pyrolysis CVD System?
Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.
What if Ultrasonic Atomization Pyrolysis CVD System is damaged in transit?
Contact your ZYLAB sales engineer immediately with photographs. We arrange a substitute delivery promptly and handle the claim with the carrier.
Quote For Ultrasonic Atomization Pyrolysis CVD System
Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.
