Zhengzhou, China Laboratory thermal processing since 2008 ISO 9001 & CE compliant
ZYLAB laboratory furnace interior

Ultrasonic Atomization Pyrolysis CVD System

The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into uniform micro- or sub-micron droplets, which are then...

Ultrasonic Atomization Pyrolysis CVD System

Overview

The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into uniform micro- or sub-micron droplets, which are then transported by carrier gas into a high-temperature reaction zone. On the substrate surface, the droplets undergo pyrolysis or chemical reactions to form high-quality solid thin films.

This technology is particularly suitable for material systems where high-purity gaseous precursors are difficult to obtain or prohibitively expensive. It represents a significant upgrade over conventional CVD and spray pyrolysis methods.

Key Features

  • Wide Range of Precursor Sources & Low Cost
    The system can utilize inexpensive and readily available liquid metal salt solutions (e.g., nitrates, chlorides, acetates), avoiding costly and hazardous metal-organic gas precursors.

  • Precise Composition Control
    Multiple precursor solutions can be mixed in controlled ratios for ultrasonic atomization, enabling precise doping and composition regulation for multicomponent thin films, such as perovskites or ternary cathode materials.

  • Excellent Film Uniformity
    Ultrasonic atomization produces fine droplets with narrow size distribution and uniform concentration, resulting in films with consistent thickness and composition.

  • Large Deposition Area
    The system supports large-area uniform deposition, making it ideal for roll-to-roll continuous production processes.

  • Relatively Low Operating Temperature
    Compared with conventional CVD, certain materials (e.g., FTO) can be deposited at lower temperatures (450–550°C), reducing thermal stress on substrates.

  • Capability to Fabricate Complex Morphologies
    By adjusting process parameters such as solution concentration, flow rate, and temperature, the system can control thin-film microstructures, including dense, porous, and nanoparticle-based films.

  • Environmentally Friendly
    The system avoids the use of highly toxic metal-organic precursors, and solvents can be recovered and reused, making the process greener and safer.

Applications

  • Transparent conductive films (e.g., FTO, ITO)

  • Perovskite solar cells and optoelectronic devices

  • Battery cathode and anode materials

  • Multicomponent oxide thin films

  • Nanostructured coatings for sensors and catalysts

All about Aerosol-Assisted Chemical Vapor Deposition (AACVD) System

Technical data

Specifications

Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.

ComponentParameterSpecification
Ultrasonic AtomizerDevice NameCorrosion-Resistant Ultrasonic Atomizer
Power SupplySingle Phase 220V 50Hz
Rated Power55 W (Atomizer: 35 W, Peristaltic Pump: 20 W)
Rated Flow Rate9 ml/min
Peristaltic Pump Head ModelWP110
Peristaltic Pump Tube Sizeφ2 mm (ID) × 1 mm (Wall Thickness)
Rotameter (Float Flow Meter)0.5–8 L/min
Solution Tank Capacity160 ml
Atomized Droplet Size5–10 μm
Atomization Frequency2.4 MHz
Device Dimensions (with Metal Rail & Base)800 mm (L) × 390 mm (H) × 280 mm (D)
Device Weight (with Metal Rail & Base)~10 kg
Mini Tube FurnaceDevice NameMini Tube Furnace
ModelO1200-50
Power Supply220V/50Hz
Rated Power1.2 kW
Maximum Temperature1200℃
Rated Temperature1150℃
Furnace ChamberΦ80 × 200 mm
Device Dimensions920 mm (L) × 460 mm (H) × 360 mm (D)
Sensor TypeK-type Thermocouple
Recommended Heating Rate10℃/min
Compatible Furnace Tube SizesΦ25 × 600 mm, Φ50 × 600 mm
Device Weight~23 kg
Control System1. 15 programmable temperature curves 2. 7-inch full-color touch screen 3. Non-linear temperature correction 4. over-temperature alarm, thermocouple failure warning, leakage protection
Temperature Accuracy±1℃
Service & WarrantyOne-year limited warranty with lifetime support (consumable parts such as processing tubes and O-rings are not covered under warranty and should be ordered separately under related products).

Processes This Unit Supports

These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.

Who Orders It

Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.

Buyer questions

Ordering Ultrasonic Atomization Pyrolysis CVD System

What is Ultrasonic Atomization Pyrolysis CVD System typically used for?

The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into u

How quickly can Ultrasonic Atomization Pyrolysis CVD System be shipped?

Most standard ZYLAB models are held in stock. After testing and packing we normally ship Ultrasonic Atomization Pyrolysis CVD System within 3 to 7 days. Customised builds are scheduled after the drawing is confirmed, and we give you the date in writing before the order is placed.

Is there a minimum order quantity for Ultrasonic Atomization Pyrolysis CVD System?

No. ZYLAB has no minimum order requirement, so a single unit of Ultrasonic Atomization Pyrolysis CVD System is a normal order. Occasionally a component supplier imposes a minimum quantity of their own, and we tell you as soon as we are notified.

Can we get technical help before ordering Ultrasonic Atomization Pyrolysis CVD System?

Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.

What if Ultrasonic Atomization Pyrolysis CVD System is damaged in transit?

Contact your ZYLAB sales engineer immediately with photographs. We arrange a substitute delivery promptly and handle the claim with the carrier.

Quote For Ultrasonic Atomization Pyrolysis CVD System

Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.