Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is designed for the growth of nanowires and the fabrication of...
Introduction
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is designed for the growth of nanowires and the fabrication of various thin films using the CVD method.
Key Features
- One-Step Cleaning and Coating: Ensures no secondary contamination during the process.
- Top-Opening Structure: Facilitates easy observation of the samples during the process.
- Fully Automatic Control: Touchscreen interface with digital display for easy operation.
- Fast Heating and Cooling: Achieved through the sliding furnace body for quick thermal response.
- Stable RF Power Supply: Ensures uniform temperature distribution, improving film quality.
Applications
The Dual Furnace Sliding PECVD System is primarily used for:
- Nanowire Growth: Ideal for growing nanowires, which are crucial in applications like nanoelectronics, sensors, and advanced materials development.
- Thin Film Deposition: Used in Chemical Vapor Deposition (CVD) processes to create various thin films for semiconductor devices, solar cells, coatings, and other electronic components.
- Material Research and Development: Suitable for developing new materials and coatings in research environments, particularly in fields like nanotechnology, materials science, and electronics.
- Semiconductor Fabrication: Employed for depositing thin films used in the production of semiconductors, photovoltaic devices, and other microelectronics.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Model | PECVD-1200-50-2 |
|---|---|
| Power Supply | AC 220V, 3KW; RF Power: 300W or 500W, 13.56 MHz |
| Maximum Temperature | 1200°C (<1 hour) |
| Continuous Temperature | 1100°C (continuous operation) |
| Heating Rate | ≤20°C/min |
| Heating Zone Length | 200mm + 200mm (split design for maximum temperature gradient control) |
| Furnace Tube Dimensions | Φ50*1800mm |
| RF Coil | Multi-node, silver-plated, water-cooled copper coil for compatibility with various RF power supplies |
| Control System | 1. Dynamic display of sintering curves and the ability to save and customize multiple process curves 2. Scheduled sintering for unattended operation 3. Real-time monitoring of sintering power and voltage, with data logging and export for paperless record-keeping 4. Remote control and real-time equipment status monitoring 5. Nonlinear temperature correction during the sintering process for both the furnace and sample |
| Temperature Accuracy | ±1°C |
| Heating Element | Mo-doped Fe-Cr-Al alloy |
| Sealing System | Come with Stainless Steel Sealing Flange. Vacuum level of 10Pa (mechanical pump)。 (Pressure Measurement and Monitoring：Using a digital vacuum gauge allows for a clear display of the equipment’s vacuum level, ensuring more accurate experimental data and results.) |
| Gas Supply System | Integrated mass flow controller |
| Net Weight | 100kg |
| Usage Precautions | 1. Do not open the furnace when the temperature exceeds 300°C to prevent injury. 2. The furnace tube pressure must not exceed 0.125MPa (absolute pressure) to avoid damage to the sealing flange. 3. When operating at high vacuum (10⁻³Pa), the temperature should not exceed 800°C. |
| Service Support | Includes a one-year limited warranty and lifetime support (excluding consumable parts like processing tubes and O-rings). Replacement parts can be ordered as needed. |
Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
Related Equipment
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Ordering Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition
What is Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition typically used for?
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is design
Can Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition be customised for our process?
Yes. Chamber or tube size, temperature profile, atmosphere, gas path, control system and data recording can all be adapted. Send us your process conditions and sample details and our engineers work out a configuration with you.
How quickly can Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition be shipped?
Most standard ZYLAB models are held in stock. After testing and packing we normally ship Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition within 3 to 7 days. Customised builds are scheduled after the drawing is confirmed, and we give you the date in writing before the order is placed.
How is Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition packed for export?
Packing is chosen for the safety of the machine against freight cost, typically a plywood or wooden crate with internal padding and vacuum-sealed accessories. Export documents such as Form A, Form E and Form F can be issued to help you save duty.
Can you supply items that are not on this page?
Yes. We have access to the complete lines of most of our suppliers and build custom equipment in our own factory, so tell us what the experiment needs and we will source or make it.
Quote For Dual-Furnace Sliding PECVD System for High-Precision Nanowire and Thin Film Deposition
Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.