Multi-Temperature Zone CVD System
Multi-Temperature Zone Integrated CVD System, with flexible combinations of gas supply and vacuum systems, meets various film deposition needs. It is the most widely used technology in the semiconductor industry for depositing thin film materials, including large-area insulating materials, as well as most metal and...
Introduction
Multi-Temperature Zone Integrated CVD System, with flexible combinations of gas supply and vacuum systems, meets various film deposition needs. It is the most widely used technology in the semiconductor industry for depositing thin film materials, including large-area insulating materials, as well as most metal and metal alloy materials. Our complete CVD coating system is suitable for major university materials laboratories, research institutes, environmental science, and other fields.
Features of Multi-Temperature Zone CVD System
- Utilizing high-purity quartz or stainless steel furnace tubes with excellent corrosion resistance and high-temperature performance.
- High-purity Al2O3 fiber refractory insulation material, providing superior insulation and reducing equipment power consumption.
- The furnace body employs a double-layer air-cooling structural design, with an automatic lifting system for opening the top cover.
- Sintering process curve settings: Dynamically display and set curves, allowing the pre-storage of multiple sintering processes. Each process curve can be freely configured.
- Scheduled sintering allows for unmanned operation, implementing scheduled sintering process curves.
- Real-time display of sintering power, voltage, and other information, recording sintering data, and enabling paperless documentation export.
- Capable of remote control to observe equipment status in real-time.
- Temperature calibration: Non-linear correction is conducted throughout the entire sintering process based on the temperature difference between the main control temperature and sample temperature.
- The integrated equipment includes a multi-channel gas supply system, multi-temperature zone heating system, and high-vacuum system.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Product name | Multi-temperature zone CVD system | |||
|---|---|---|---|---|
| Temperature zone | Three | Four | Five | Six |
| Tube size | Ø25/Ø50/Ø60/Ø80/Ø100*1600mm | |||
| Working temperature | ≤1150℃ | |||
| Heating zone optional (Customizable) | 200mm*3 /200+300+200mm /200+400+200mm /300mm*3 /300+400+300mm | 200mm*4 / 200+300+300+200mm /200+400+400+200mm /300mm*4 /300+400+400+300mm | 200mm*5 300mm*5 | 200mm*6 300mm*6 |
| Heating rate | ≤20℃/s | |||
| Power supply | 6~10KW AC380V | 8~14KW AC380V | 10~15KW AC380V | 12~18KW AC380V |
| Gas system (Optional) | Float or proton(Float or mass flow meter (MFC)) | |||
| Piping Diagram | ||||
| Quantity of Inlet ports | 2、3、4 (Multiple Options Available) | |||
| Flow Range | 20-250/20-800ml/min……( Multiple range optional) 50/100/200/500sccm……( Multiple range optional) | |||
| Operating Pressure Differential Range | 0-0.15MPa | |||
| Low Vacuum System (Optional) | Vacuum model | 3C / 4C | ||
| Pumping rate | 3L/s or 4L/s | |||
| Inlet and Outlet Port Dimensions | KF16/25 | |||
| Vacuum level of the system | 3~5Pa (Ultimate Vacuum Level of the Vacuum Pump:6.2*10-2Pa) | |||
| Operating Environment Temperature | 5-40℃ | |||
| Power supply | AC220V | |||
| High Vacuum System (Optional) | Vacuum model | 103(A) | 103(B) | |
| Pumping rate | 110L/s | 600L/s | ||
| Vacuum Gauge | Compound Vacuum Gauge | |||
| Vacuum level of the system | 4.3*10^-3Pa | 6*10^-4Pa | ||
| Operating Environment Temperature | 5-40℃ | |||
| Power supply | AC 220V | AC 380V |
Multi-Temperature Zone CVD System In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
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Ordering Multi-Temperature Zone CVD System
What is Multi-Temperature Zone CVD System typically used for?
Multi-Temperature Zone Integrated CVD System, with flexible combinations of gas supply and vacuum systems, meets various film deposition needs. It is the most widely used technology in the semiconductor industry for depositing thin film materials, including la
Can Multi-Temperature Zone CVD System be customised for our process?
Yes. Chamber or tube size, temperature profile, atmosphere, gas path, control system and data recording can all be adapted. Send us your process conditions and sample details and our engineers work out a configuration with you.
What warranty comes with Multi-Temperature Zone CVD System?
Most ZYLAB products carry a 2-year warranty, glass components excluded; the exact term for this model is the one printed in its specification table and repeated on the quotation. Within the warranty period any part that fails through no misuse of your own is replaced free of charge.
How can we pay for Multi-Temperature Zone CVD System?
Bank (wire) transfer, letter of credit for larger orders, major credit and debit cards, and PayPal. Bank details are printed on the invoice; send us the transfer confirmation and we start processing straight away.
How is Multi-Temperature Zone CVD System packed for export?
Packing is chosen for the safety of the machine against freight cost, typically a plywood or wooden crate with internal padding and vacuum-sealed accessories. Export documents such as Form A, Form E and Form F can be issued to help you save duty.
Quote For Multi-Temperature Zone CVD System
Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.