1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door
This Three-Zone CVD Tube Furnace offers flexible combinations of gas supply and vacuum systems, making it suitable for various thin film deposition processes. It is widely used in the semiconductor industry for depositing thin film materials, including large-area insulating materials and most metallic and metal alloy...
Introduction
This Three-Zone CVD Tube Furnace offers flexible combinations of gas supply and vacuum systems, making it suitable for various thin film deposition processes.
It is widely used in the semiconductor industry for depositing thin film materials, including large-area insulating materials and most metallic and metal alloy materials. Our complete CVD coating systems are ideal for use in material laboratories of universities, research institutes, environmental science fields, and more.
Features of Three-Zone CVD Tube Furnace
- High-Purity Quartz Tube: Excellent corrosion resistance and high-temperature performance.
- High-Purity Al2O3 Fiber Insulation: Superior thermal insulation, reducing power consumption.
- Double-Layer Air-Cooling Structure: Efficient heat dissipation with a dual-layer air-cooling design.
- Automatic Lifting Furnace Door: Easy access with an automatic lifting system for the furnace door.
- Embedded Operating System: Bilingual (Chinese/English) interface, 7-inch touchscreen, real-time heating display, automatic report generation, and unlimited data export.
- Integrated System: Includes multi-path gas supply, three-zone heating, and high-vacuum system.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Product Name | Three Zone CVD Tube Furnace With Vacuum Pump | |
|---|---|---|
| Model | O1200-120T3GD2F | |
| Heating system | Furnace dimensions | L×W×H=1700mm×760mm×1200mm |
| Reaction chamber dimensions | High-purity quartz, outer diameter 120mm, inner diameter 112mm*(200+400+200)mm | |
| Main control working temperature | ≤1150℃ | |
| Opening method | Electrically open or close the furnace chamber through screen buttons for easy viewing of sample position and replacing the furnace tube | |
| heating rate | Recommended ≤20℃/min | |
| heating element | HRE (High-Resistance Element) | |
| furnace chamber material | Alumina fiber insulation refractory material | |
| temperature zone length | 200+400+200mm | |
| Temperature control accuracy | ±1℃ | |
| Sealing method | Self-sealing, with temperature measurement hole and handheld thermometer | |
| Temperature measurement element | 3 sets of K-type thermocouples for more uniform temperature control (three-zone temperature control) Provide the ability to set a thermal profile for each heating zone | |
| Gas system configuration | Flow meter | 2-channel float flow meter (0.1-1.5L/min, 20-200ml/min,other flow range can be customized) |
| Pressure gauge | Mechanical vacuum pressure gauge | |
| Regulating valve | Manual regulating valve | |
| Pipeline connection method | Double-card sleeve PTFE tubing connection (φ6.35) | |
| Pressure range | -0.1-0.15Mpa (absolute pressure) | |
| Opening system | Transmission mode | Lever transmission |
| Motor | DC linear actuator motor | |
| Sensor type | Two sets of displacement sensors to prevent loss of control | |
| Vacuum system | Vacuum pump | Mechanical vacuum pump: Direct-drive rotary vane vacuum pump (two-stage rotary vane) |
| Pumping rate | 9.9(m³/H) | |
| Inlet/outlet connection | KF25 (mm) | |
| Motor speed | 1440 (rpm) | |
| Ambient Temperature | 5～40℃ | |
| Noise level (dB) | ≤56 | |
| Vacuum gauge | Digital vacuum gauge, capable of digitally displaying the pressure inside the furnace tube | |
| Vacuum level | 5-10Pa | |
| Pressure sensor | Displays positive pressure inside the tube and allows for setting of overpressure alarms | |
| Differential pressure sensor | Maintains a certain pressure difference inside the tube | |
| Control system | Control mode | Embedded operating system with graphical interface in both Chinese and English, 7-inch color touchscreen input, intelligent human-machine dialogue mode |
| Temperature curve setting | can store up to 15 temperature curves, each curve can be set with 30 segments of “time-temperature curve,” real-time monitoring, dynamically displaying the “time-temperature curve” | |
| Temperature calibration | Non-linear correction of the temperature difference between the temperature control temperature and the sample temperature throughout the system | |
| Equipment operation time recording | Sintering data storage, automatic report generation, real-time recording and retrieval | |
| System protection | Over-temperature alarm, over-current protection, open circuit prompt | |
| Others | Electrical specifications | Three-phase 380V, 50Hz, 8KW |
| Included accessories | 1 furnace tube, 1 set of sealing flanges, 1 set of quartz thermoblocks, 1 user manual, miscellaneous tools, etc. |
1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
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Ordering 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door
What is 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door typically used for?
This Three-Zone CVD Tube Furnace offers flexible combinations of gas supply and vacuum systems, making it suitable for various thin film deposition processes. It is widely used in the semiconductor industry for depositing thin film materials, including large-a
What warranty comes with 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door?
Most ZYLAB products carry a 2-year warranty, glass components excluded; the exact term for this model is the one printed in its specification table and repeated on the quotation. Within the warranty period any part that fails through no misuse of your own is replaced free of charge.
Can we get technical help before ordering 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door?
Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.
Which shipping methods do you use?
Sea freight for consignments over about 60 kg (11-30 days to North America, 25-33 days to Europe, 7-20 days to Southeast Asia), air freight to airport in roughly 7-10 days, and DHL, FedEx or UPS door to door in about 5-7 days for small urgent items.
How can we pay for 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door?
Bank (wire) transfer, letter of credit for larger orders, major credit and debit cards, and PayPal. Bank details are printed on the invoice; send us the transfer confirmation and we start processing straight away.
Quote For 1200.C Three Zone CVD Tube Furnace with Electrically Controlled Opening Door
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