Dual Furnace PECVD System for Nanowire Growth
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is designed for the growth of nanowires and the fabrication of...
Introduction
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is designed for the growth of nanowires and the fabrication of various thin films using the CVD method.
Key Features
- One-Step Cleaning and Coating: Ensures no secondary contamination during the process.
- Top-Opening Structure: Facilitates easy observation of the samples during the process.
- Fully Automatic Control: Touchscreen interface with digital display for easy operation.
- Fast Heating and Cooling: Achieved through the sliding furnace body for quick thermal response.
- Stable RF Power Supply: Ensures uniform temperature distribution, improving film quality.
Applications
The Dual Furnace Sliding PECVD System is primarily used for:
- Nanowire Growth: Ideal for growing nanowires, which are crucial in applications like nanoelectronics, sensors, and advanced materials development.
- Thin Film Deposition: Used in Chemical Vapor Deposition (CVD) processes to create various thin films for semiconductor devices, solar cells, coatings, and other electronic components.
- Material Research and Development: Suitable for developing new materials and coatings in research environments, particularly in fields like nanotechnology, materials science, and electronics.
- Semiconductor Fabrication: Employed for depositing thin films used in the production of semiconductors, photovoltaic devices, and other microelectronics.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Model | PECVD-1200-50-2 |
|---|---|
| Power Supply | AC 220V, 3KW; RF Power: 300W or 500W, 13.56 MHz |
| Maximum Temperature | 1200°C (<1 hour) |
| Continuous Temperature | 1100°C (continuous operation) |
| Heating Rate | ≤20°C/min |
| Heating Zone Length | 200mm + 200mm (split design for maximum temperature gradient control) |
| Furnace Tube Dimensions | Φ50*1800mm |
| RF Coil | Multi-node, silver-plated, water-cooled copper coil for compatibility with various RF power supplies |
| Control System | 1. Dynamic display of sintering curves and the ability to save and customize multiple process curves 2. Scheduled sintering for unattended operation 3. Real-time monitoring of sintering power and voltage, with data logging and export for paperless record-keeping 4. Remote control and real-time equipment status monitoring 5. Nonlinear temperature correction during the sintering process for both the furnace and sample |
| Temperature Accuracy | ±1°C |
| Heating Element | Mo-doped Fe-Cr-Al alloy |
| Sealing System | Come with Stainless Steel Sealing Flange. Vacuum level of 10Pa (mechanical pump)。 (Pressure Measurement and Monitoring：Using a digital vacuum gauge allows for a clear display of the equipment’s vacuum level, ensuring more accurate experimental data and results.) |
| Gas Supply System | Integrated mass flow controller |
| Net Weight | 100kg |
| Usage Precautions | 1. Do not open the furnace when the temperature exceeds 300°C to prevent injury. 2. The furnace tube pressure must not exceed 0.125MPa (absolute pressure) to avoid damage to the sealing flange. 3. When operating at high vacuum (10⁻³Pa), the temperature should not exceed 800°C. |
| Service Support | Includes a one-year limited warranty and lifetime support (excluding consumable parts like processing tubes and O-rings). Replacement parts can be ordered as needed. |
Dual Furnace PECVD System for Nanowire Growth In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
Related Equipment
Models from the same family and the same processes, in case a different chamber size or temperature range fits better.
Fluidized Bed Calcination Furnace for Powder and Fine Particle Materials
1200°C Dual-Zone Vertical Fluidized Bed CVD (FBCVD) Furnace with Automatic Feeding and Discharging System
Vertical High Temperature Tube Furnace – 1500°C / 1700°C for Laboratory and R&D
Vacuum Atmosphere Hybrid Box/Tube Furnace for Precision Heat Treatment
1200°C Hydrogen Rotary Tube Furnace for Metallurgical Research
Advanced Continuous Pyrolyzers for Biomass and Organic Solid Waste Thermal Processing & Sintering
1700°C Vertical Atmosphere Controlled Quenching Furnace for High-Performance Heat Treatment
Customizable Tube Furnace with Gas Control System – Precision Atmosphere Processing
Ordering Dual Furnace PECVD System for Nanowire Growth
What is Dual Furnace PECVD System for Nanowire Growth typically used for?
The Dual Furnace Sliding PECVD system features a dual-temperature zone tube furnace, incorporating a 500W RF generator, two movable independent sintering furnaces, a high-precision mass flow mixing system, and a stable anti-backlash vacuum system. It is design
What warranty comes with Dual Furnace PECVD System for Nanowire Growth?
Most ZYLAB products carry a 2-year warranty, glass components excluded; the exact term for this model is the one printed in its specification table and repeated on the quotation. Within the warranty period any part that fails through no misuse of your own is replaced free of charge.
Can we get technical help before ordering Dual Furnace PECVD System for Nanowire Growth?
Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.
Which shipping methods do you use?
Sea freight for consignments over about 60 kg (11-30 days to North America, 25-33 days to Europe, 7-20 days to Southeast Asia), air freight to airport in roughly 7-10 days, and DHL, FedEx or UPS door to door in about 5-7 days for small urgent items.
How can we pay for Dual Furnace PECVD System for Nanowire Growth?
Bank (wire) transfer, letter of credit for larger orders, major credit and debit cards, and PayPal. Bank details are printed on the invoice; send us the transfer confirmation and we start processing straight away.
Quote For Dual Furnace PECVD System for Nanowire Growth
Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.