Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace
The large-size wafer annealing furnace is specially developed and manufactured for large workpieces or batch heat treatment production. It is primarily used in industries such as semiconductor wafer annealing, LED phosphor, substrate materials, battery materials production, and more. The furnace tube is made of...
Introduction
The large-size wafer annealing furnace is specially developed and manufactured for large workpieces or batch heat treatment production. It is primarily used in industries such as semiconductor wafer annealing, LED phosphor, substrate materials, battery materials production, and more. The furnace tube is made of large-diameter high-purity quartz material, which can be used for both atmosphere processing and vacuum applications. It adopts intelligent PID fuzzy control and multi-point temperature measurement to ensure uniform temperature distribution inside the furnace.
Features of Wafer Annealing Furnace
- Extra-large tube diameter, long heating zone, multi-point temperature control ensures uniform temperature distribution.
- High-purity Al2O3 fiber refractory insulation material, providing excellent thermal insulation, significantly reducing the power consumption of the equipment.
- The furnace body adopts a double-layer air-cooling structure to effectively lower the surface temperature of the furnace shell.
- Equipped with a constant pressure system that automatically adjusts the internal pressure of the furnace tube.
- Quick-opening stainless steel sealing flanges for easy loading and unloading of materials.
Precautions for Use
- When using the equipment, the internal pressure of the furnace tube must not exceed 0.125MPa (absolute pressure) to prevent equipment damage.
- Gas cylinders have high internal pressure. When feeding gas into the furnace tube, a pressure-reducing valve must be installed on the gas cylinder. It is recommended to select a small pressure-reducing valve with a range of 0.01MPa-0.15MPa for more accurate and safer operation.
- When the furnace temperature exceeds 1000°C, the furnace tube should not be under vacuum. The internal pressure of the furnace tube should be at atmospheric pressure.
- During heating experiments, it is not recommended to close the gas inlet and outlet valves at the furnace tube flanged ends. If gas valves must be closed during sample heating, constantly monitor the pressure gauge reading. The absolute pressure gauge reading should not exceed 0.15MPa.
Which Kinds of Industry Can Use This Furnace?
College & Universities, Institute, enterprise, Chemistry, Electronics,etc
For research and manufacture of semiconductor, LED phosphors, substrate materials, and battery materials, etc
Applications
The large-size wafer annealing furnace is specially developed and manufactured for large workpieces or batch heat treatment production. It is primarily used in industries such as semiconductor wafer annealing, LED phosphor, substrate materials, battery materials production, and more.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Model | T1200-152T2 | T1200-152T3 | T1200-215T3 |
|---|---|---|---|
| Power Supply | AC380V 10KW | AC380V 15KW | AC380V 24KW |
| Max.temp | 1200 ℃ (<1hour) | ||
| Working temp | 1100 ℃ (Continuous) | ||
| Heating Rate | ≤ 20°C/min | ||
| Heating Zone Length | 600mm | 1100mm | 1100mm |
| Furnace Tube Size | Φ152*1200mm | Φ152*1650mm | Φ215*1660mm |
| Intelligent Touch Screen Control System | 1. Embedded system with a bilingual (Chinese/English) graphical interface, 7-inch color touch screen input, intelligent human-machine interaction mode, non-linear temperature correction. 2. More intuitive experimental process, easier operation. 3. Features over-temperature alarm, thermocouple disconnection alert, and leakage protection. | ||
| Temperature Accuracy | +/- 1 ℃ | ||
| Heating Element | Mo-doped Fe-Cr-Al Alloy | ||
| Sealing System Quick-opening stainless steel sealing flanges | |||
| Vacuum: ≤10Pa (Mechanical Pump) | |||
| Pressure Measurement and Monitoring | Intelligent digital pressure gauge for precise pressure display and adjustable pressure settings. It works with a high-precision, high-stability solenoid valve to maintain stable internal furnace tube pressure. Additionally, the device is equipped with a backup pressure protection system for enhanced safety and reliability. | ||
| Gas Supply System | Floater flow meter to control gas flow rate, integrated with the equipment. Leakage testing is performed before delivery | ||
| Net Weight | 85KG | 105KG | 215KG |
| Service Support | 1-year warranty with lifetime support (does not cover consumables such as furnace tubes and seals). |
Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
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Ordering Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace
What is Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace typically used for?
The large-size wafer annealing furnace is specially developed and manufactured for large workpieces or batch heat treatment production. It is primarily used in industries such as semiconductor wafer annealing, LED phosphor, substrate materials, battery materia
What warranty comes with Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace?
Most ZYLAB products carry a 2-year warranty, glass components excluded; the exact term for this model is the one printed in its specification table and repeated on the quotation. Within the warranty period any part that fails through no misuse of your own is replaced free of charge.
Can we get technical help before ordering Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace?
Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.
Which shipping methods do you use?
Sea freight for consignments over about 60 kg (11-30 days to North America, 25-33 days to Europe, 7-20 days to Southeast Asia), air freight to airport in roughly 7-10 days, and DHL, FedEx or UPS door to door in about 5-7 days for small urgent items.
How can we pay for Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace?
Bank (wire) transfer, letter of credit for larger orders, major credit and debit cards, and PayPal. Bank details are printed on the invoice; send us the transfer confirmation and we start processing straight away.
Quote For Large-Size Tubular Furnace 1200℃ Wafer Annealing Furnace
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