RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films
Rapid Thermal Processing Furnace is referred to as RTP furnace, which not only has a very fast heating rate, but also can directly move the sample to room temperature after the sintering process is completed to achieve rapid cooling in the physical state. The equipment adopts the gas path structure of the inner tube...
Introduction
Rapid Thermal Processing Furnace is referred to as RTP furnace, which not only has a very fast heating rate, but also can directly move the sample to room temperature after the sintering process is completed to achieve rapid cooling in the physical state.
The equipment adopts the gas path structure of the inner tube inlet and the outer tube outlet, so that the reaction atmosphere can fully and evenly contact the processed samples.
It is a common equipment for growing large-size two-dimensional graphene by CVD method. The temperature measuring element is in direct contact with the sample to ensure the accuracy of the sample temperature.
Characteristics
1. Double layer steel structure.
2. Max speed of temperature rising up to 100.C/S.
3. Double layer tube structure, the sample exposes in the atmosphere much more Constantly.
4.Measure the temperature of the sample surface directly, more accuracy.
5.The chamber can move from one side to another side according to users’ preset, this will meet more lab applications.
6.Rich expansion interface, to meet the needs of various types of tests.
7. High-purity Al2O3 fiber refractory insulation material saves energy to the greatest extent.
Applications
RTA(Rapid Thermal Annealing);
Graphene and other vapor deposition, epitaxial growth of carbon nanotubes, etc.
RTO; RTN (Rapid Thermal Oxidation/Rapid Thermal Nitridation);
RTP Annealing for Semiconductor Industry;
Silicidation;
Diffusion;
Implant Annealing;
Contact Alloying;
Crystallization and Densification.
Specifications
Figures below are the manufacturer data for this model. Anything not listed is confirmed in writing with the quotation rather than estimated here.
| Model | HR1100-110IT |
|---|---|
| Power supply | 380V, 15KW |
| Rated temperature | 1100.C (For long-term use, an external water cooling device must be connected) |
| Continue temperature | 100-1000.C (Continuous use must be connected to an external water cooling device) |
| Heating rate | Suggested ≤ 100.C/S |
| Temperature accuracy | +/- 1.C |
| Thermocouple | S type single platinum rhodium |
| Heating element | Infrared tube heating |
| Length of heating zone | 200mm |
| Constant temperature zone | 100mm |
| Tube material | High purity quartz |
| Tube size | D110*L380mm |
| Control system | PID automatic control and auto-tune function. 30 programmable segments for precise control. Built in protection for over-heated and broken thermal couple, and leakage. Centralized control 7” color LCD touch screen man-machine English graphics interface, clear heating process, more intuitive and convenient operation. Can store sintering programs to avoid the trouble caused by repeated settings of different experimental processes. |
| Presetting curve | 15 presetting curve |
| Protection setting | Over temperature alarm, over current protection, broken thermocouple protection |
| Sealing system | Stainless steel vacuum flange Vacuum level ≤5Pa (mechanical pump) |
| Pressure Measurement and Monitoring | Standard: Mechanical pressure gauge with airtight casing, corrosion resistant. Optional: Digital vacuum gauge with higher precision |
| Expansion port | Vacuum measurement and FFC gas supply |
| Dimension | 800(L) * 750(W) * 540(H)mm |
| Weight | 90KGS |
| Warranty | One-year warranty, lifetime support (excluding consumable parts such as furnace tubes, O-rings ) |
| Certificate | CE, ISO9001 |
RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films In Detail
Processes This Unit Supports
These are the applications ZYLAB lists this model under. Each link opens the full equipment set for that process, which is useful when a project needs more than one machine.
Who Orders It
Fields this model already works in, plus what ZYLAB puts behind it: a 2-year warranty on most products, glass excluded, spare parts in stock and free application support by WhatsApp or email.
Related Projects
Related Equipment
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Ordering RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films
What is RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films typically used for?
Rapid Thermal Processing Furnace is referred to as RTP furnace, which not only has a very fast heating rate, but also can directly move the sample to room temperature after the sintering process is completed to achieve rapid cooling in the physical state. The
How quickly can RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films be shipped?
Most standard ZYLAB models are held in stock. After testing and packing we normally ship RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films within 3 to 7 days. Customised builds are scheduled after the drawing is confirmed, and we give you the date in writing before the order is placed.
Is there a minimum order quantity for RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films?
No. ZYLAB has no minimum order requirement, so a single unit of RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films is a normal order. Occasionally a component supplier imposes a minimum quantity of their own, and we tell you as soon as we are notified.
Can we get technical help before ordering RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films?
Yes, and it is free. Our technical staff help with model selection, troubleshooting, manuals and application questions whether or not you have ordered from us before. Write to [email protected] or message us on WhatsApp.
What if RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films is damaged in transit?
Contact your ZYLAB sales engineer immediately with photographs. We arrange a substitute delivery promptly and handle the claim with the carrier.
Quote For RTP Furnace for Rapid Thermal Processing of Semiconductor Thin Films
Tell us the sample, the temperature and the atmosphere. You get the configuration, the price and the despatch date in one reply.